| 摘要 |
<p>PURPOSE:To provide a gradation mask with stepwise change of the transmittance which can be manufactured in a correct, efficient and inexpensive manner, and where the transmittance is changed stepwise. CONSTITUTION:The transmittance is changed stepwise in the space over three steps which substantially includes 0% and 100% in a gradation mask, and the region (a) where at least the transmittance is substantially 0% has the specified transmittance other than 0% and 10 0%, and a semi-transparent film 12 whose phase difference is one half or an odd multiple of one half of the wavelength to be substantially used is provided in a finely repetitive pattern. The region (b) of the intermediate is provided with the semi-transparent film 12 over the whole area of the transparent substrate 11.</p> |
