SPUTTERING DEVICE AND SPUTTERING METHOD,申请号JP19940141110-传众专利搜索

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发明名称	SPUTTERING DEVICE AND SPUTTERING METHOD
摘要
申请公布号	JPH07331431(A)	申请公布日期	1995.12.19
申请号	JP19940141110	申请日期	1994.05.31
申请人	SONY CORP	发明人	URAI AKIRA
分类号	C23C14/34;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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