| 摘要 |
PCT No. PCT/JP93/00170 Sec. 371 Date Nov. 22, 1993 Sec. 102(e) Date Nov. 22, 1993 PCT Filed Feb. 10, 1993 PCT Pub. No. WO93/16377 PCT Pub. Date Aug. 19, 1993A humidity sensor to detect humidity by utilizing a change in the electric characteristics of the device corresponding to a change in the humidity. A solution containing manganese acetate, lead acetate and potassium acetate is coated on an alumina substrate on which interdigital electrodes are formed, and heat-treatment is carried out to provide a humidity sensor having a humidity sensing film which mainly contains manganese oxide, lead oxide and a compound of the alkali metal. The humidity sensor shows a low impedance and an appropriate dynamic range of the impedance even after being downsized. The humidity sensor shows a quick response and excellent environmental resistance. In addition, the humidity sensor and a humidity measuring circuit are easily produced. Thus, the humidity sensor can be widely used in those fields that require a humidity sensor of a small size, a quick response, high reliability and a low cost such as in portable instruments and the like.
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