| 摘要 |
PROBLEM TO BE SOLVED: To stick a pellicle on a reticle without replacing a pressure plate for rectangular frames of different size by the pellicle sticking device which sticks a rectangular frame having a pellicle stuck over one surface on the reticle. SOLUTION: The pressure plate which grips the rectangular frame which has the pellicle stuck over one surface and an adhesive area formed at each side part of the reverse surface and presses the adhesion area brought into contact with the reticle to press the rectangular frame against the reticle is provided on a table 51. Then this device has pressure plates 52a to 52d which are provided slidably on sliders 72a to 72d so that the length of a depression area can be varied corresponding to the length of the adhesion area at each side part of the rectangular frame. |
