发明名称 |
Crystal pulling apparatus |
摘要 |
A crystal pulling apparatus is disclosed which employs the Czochralski method. The crystal pulling apparatus is operated while a heater for heating a material melt in a crucible is controlled by the main controller of a main system. When maintenance of a heating state is disabled for some reason, a relay of a signal changeover circuit is switched so as to maintain the heating state under control of the backup controller of a backup system, thereby maintaining the material melt in a molten state. Thus, even when it becomes impossible for the main system to heat the material melt within the crucible, the material melt can be prevented from becoming solidified.
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申请公布号 |
US5851286(A) |
申请公布日期 |
1998.12.22 |
申请号 |
US19960763888 |
申请日期 |
1996.12.11 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
OZAKI, ATSUSHI;URANO, MASAHIKO;HARADA, ISAMU;KAKEGAWA, TOMOHIRO;NAKANO, HIDEKI |
分类号 |
C30B15/00;C30B15/14;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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