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发明名称
APPARATUS FOR PREVENTING ARM COLLISION OF WAFER LOADING PART FOR EXPOSING PROCESS
摘要
申请公布号
KR0132111(Y1)
申请公布日期
1999.02.01
申请号
KR19940033471U
申请日期
1994.12.09
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
KIM, JAE-HONG;EUM, SUNG-YEUL
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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