SAFETY DEVICE OF GAS SUPPLY EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR

摘要

PURPOSE: A safety device of a gas supply equipment for manufacturing semiconductor is provided to supply gas to an inside of a reaction furnace by using an additional gas container. CONSTITUTION: A safety device of a gas supply equipment for manufacturing semiconductor relates to a safety device for performing continuously a process by supplying an additional gas when a flammable gas supply is intercepted by closing of a supply valve. A pipe line is connected between a gas container(2) and a reaction furnace. A gas control valve(V1-V5) and a regulator(R) are disposed to the pipe line. An additional gas container(20) is connected to the regulator through an additional pipe line(40). A solenoid valve(Vs) is disposed to the additional pipe line. A controller(10) controls the solenoid valve.