PIEZOELECTRIC THIN FILM, PIEZOELECTRIC ELEMENT, ACTUATOR MECHANISM AND INFORMATION RECORDING/REPRODUCING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To improve the characteristics of a piezoelectric thin film and a piezoelectric element by making smooth the surface of a substrate, and to provide a piezoelectric actuator and an information recording/reproducing device, wherein a magnetic head is highly accurately controlled. SOLUTION: For the method of preventing variance in characteristics due to the recessed and projecting parts of a surface, a film is formed on a base material having the surface roughness (Ra) of a substrate 1 surface set equal to 0.05μm or lower. Depending on a substrate to be used, it is difficult to obtain a base material having a good surface characteristics. In such a case, a film is formed after polishing carried out by using a polisher, or a surface characteristics improved film 4 is formed before a piezoelectric film 3 is formed, and thus the surface characteristics are improved.