发明名称 FABRICATION OF SEMICONDUCTOR DEVICES
摘要 A method for fabrication of a semiconductor device on a substrate, the semiconductor having a wafer. The method includes the steps:(a) applying a seed layer of a thermally conductive metal to the wafer;(b) electroplating a relatively thick layer of the conductive metal on the seed layer, and(c) removing the substrate. A corresponding semiconductor device is also disclosed.
申请公布号 EP1668688(A1) 申请公布日期 2006.06.14
申请号 EP20030818739 申请日期 2003.09.19
申请人 TINGGI TECHNOLOGIES PRIVATE LIMITED 发明人 KANG, XUEJUN;WU, DAIKE;PERRY, EDWARD ROBERT;YUAN, SHU
分类号 H01L33/00;H01L21/027;H01L21/285;H01L21/4763;H01L23/36;H01L23/367;H01L23/373;H01L31/024;H01L31/052;H01L31/18;H01L33/32;H01L33/36;H01L33/44;H01L33/64;H01S5/02;H01S5/024;H01S5/042;H01S5/323 主分类号 H01L33/00
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