| 摘要 |
<p>PURPOSE:To curtail the manufacturing cost, and also, to easily correct a film formation defective part. CONSTITUTION:Plate-like bodies 2, 3 having an opening part 9 are stuck to each other by two pieces or more, and an opening area 11 in which the opening parts of each pate-like body are superposed to each other is formed so as to be variable by varying an opening area of the opening part of at least one plate-like body. Or this body is provided with plural pieces of opening parts, and by suitably selecting one of these opening part and placing a shielding member, the opening area of the opening part is made variable. Or, one shielding long-sized body is arrayed suitably by plural pieces so as to run along one side of a rectangular frame body, and also, the other shielding long-sized body is arrayed suitably by plural pieces so as to run along a side being orthogonal to the above-mentioned one side, so that light, an ion or an atom passes through a space area surrounded by one shielding long-sized body and another shielding long-sized body, and also, the opening area is made variable.</p> |
