MOVABLE TRANSFER CHAMBER AND SUBSTRATE PROCESSING APPARATUS COMPRISING THE SAME

摘要

A movable transfer chamber and a substrate processing apparatus with the same are provided to use efficiently a predetermined space and to reduce fabrication costs by arranging variously a process chamber and a loadlock chamber. A transfer chamber(100) includes a substrate transfer unit at an inner portion and an exit at one side. The transfer chamber is capable of being transferred to a process chamber(200). The transfer chamber is connected with the process chamber in order to exchange substrates. The transfer chamber is transferred to an aiming position by using a transfer chamber moving unit. A plurality of process chambers are arranged at one side or both sides of the transfer chamber moving unit.