发明名称 METHOD OF FORMING IMAGE SENSOR
摘要 A method for forming an image sensor is provided to prevent the generation of flicker noises by restraining nitrogen from penetrating into a gate insulating layer using an enhanced dual gate insulating layer structure with a second gate insulating layer formed under nitrogen gas atmosphere. A first region and a second region are defined on a semiconductor substrate(1). A first gate electrode layer(9) is formed on the first region of the substrate via a first gate insulating layer(7) and a second gate electrode layer is formed on the second region of the substrate via a second gate insulating layer(15). A first gate pattern and a second gate pattern are formed within the first and the second regions by performing selectively a patterning process on the resultant structure. The second gate insulating layer is formed under nitrogen atmosphere.
申请公布号 KR20070028973(A) 申请公布日期 2007.03.13
申请号 KR20050083797 申请日期 2005.09.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, WON JE;SONG, JAE HO;PARK, YOUNG HOON
分类号 H01L27/146 主分类号 H01L27/146
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