发明名称 |
Polycarbocyclic derivatives for modification of resist, optical and etch resistance properties |
摘要 |
Mixed carbocycle derivatives containing at least two carbocycles per molecule from the group of anthracenes, adamantanes and steroids with functionalized carbon chains are synthesized and used as modifiers of resist properties and especially etch resistance enhancement and absorption characteristics. These derivatives are characterized by formulas I-V, where A and R may be an anthryl- and/or an adamantyl- and/or a steroid moiety. Methods for the preparation of the above compounds are disclosed.
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申请公布号 |
US7326510(B2) |
申请公布日期 |
2008.02.05 |
申请号 |
US20040494547 |
申请日期 |
2004.04.30 |
申请人 |
GOGOLIDES EVANGELOS;ARGITIS PANAGIOTIS;COULADOUROS ELIAS ANDREA;VIDALI VERONIKI PETROU;VASILOPOULOU MARIA;CORDOYIANNIS GEORGE |
发明人 |
GOGOLIDES EVANGELOS;ARGITIS PANAGIOTIS;COULADOUROS ELIAS ANDREA;VIDALI VERONIKI PETROU;VASILOPOULOU MARIA;CORDOYIANNIS GEORGE |
分类号 |
G03F7/004;C07C69/00;C07C69/96;C07C211/31;C07C211/42;C07C211/61;C07C233/65;C07H13/08;C07J7/00;C07J41/00;G03F7/039 |
主分类号 |
G03F7/004 |
代理机构 |
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