| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high-purity trialkylaluminum slight in silicon atom content, and to provide a simple method for producing the same. SOLUTION: The high-purity trialkylaluminum less than 0.7 mass ppm in silicon atom content is obtained by the following process. A trialkylaluminum is reacted with a trialkylamine to form an aluminum-amine complex, and the resultant reaction mixture is distilled to obtain the complex, which is then dissociated. This high-purity trialkylaluminum thus obtained can be used as a raw material for producing highly functional compound semiconductors by e.g. epitaxial growth process. COPYRIGHT: (C)2008,JPO&INPIT
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