发明名称 COATING PROCESS FOR MANUFACTURE OR REPROCESSING OF SPUTTER TARGETS AND X-RAY ANODES.
摘要 <p>Disclosed is a process for the reprocessing or production of a sputter target or an X-ray anode wherein a gas flow forms a gas/powder mixture with a powder of a material chosen from the group consisting of niobium, tantalum, tungsten, molybdenum, titanium, zirconium, mixtures of two or more thereof and alloys thereof with at least two thereof or with other metals, the powder has a particle size of 0.5 to 150 ??m, wherein a supersonic speed is imparted to the gas flow and the jet of supersonic speed is directed on to the surface of the object to be reprocessed or produced.</p>
申请公布号 MX2007013601(A) 申请公布日期 2008.03.18
申请号 MX20070013601 申请日期 2006.04.28
申请人 H.C. STARCK GMBH 发明人 STEFAN ZIMMERMANN;UWE PAPP;HANS KELLER;STEVEN ALFRED MILLER
分类号 C23C14/34;C23C24/04;H01J35/00 主分类号 C23C14/34
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