| 摘要 |
A susceptor for a glass substrate is provided to impede damage of the glass substrate, thereby perform a reliable deposition process on the glass substrate by smoothly separating a glass substrate and a susceptor from each other after the deposition process, a manufacturing method of the susceptor for the glass substrate is provided, and a chemical vapor deposition apparatus including the susceptor for the glass substrate is provided. A susceptor(30) for a glass substrate comprises a susceptor body(34), a first concavo-convex surface(35), and a second concavo-convex surface(36). The susceptor body is metallic material. The first concavo-convex surface is formed in a first concavo-convex pattern by processing the surface of the susceptor body. The second concavo-convex surface is formed on the first concavo-convex surface by processing the first concavo-convex surface again. The second concavo-convex surface is formed in a second concavo-convex pattern having a width and a depth smaller than those of the first concavo-convex pattern. The second concavo-convex surface is substantially brought into contact with a glass substrate for a flat panel display to be loaded on the second concavo-convex surface.
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