| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device and a shape measuring method capable of improving the measurement accuracy by reducing maximaly an influence of light other than measuring light. SOLUTION: This shape measuring device for measuring a three-dimensional shape of a specimen, by irradiating the measuring light (slit light from a slit light source 51) to the specimen A is equipped with a detection part (optical sensor 20) for detecting the change in a light other than the measuring light; a timing generating part (shutter timing circuit 40) for determining a timing suitable for shape measurement of the specimen, based on information detected by the detection part, and a measuring part (a slit light source 51 and a camera 52) for measuring the shape of the specimen, at a timing generated by the timing generating part. COPYRIGHT: (C)2009,JPO&INPIT
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