| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump with high driving efficiency in which the number of mechanical switching valves is decreased to reduce pressure loss, and increase reliability, which is ready for high load pressure and high-frequency driving, and which increases the discharged fluid volume for one cycle of pumping. SOLUTION: A circular diaphragm 5 disposed on the bottom of a case 7 is fixed and supported on the case 7 at its outer peripheral edge. A piezoelectric element 6 for moving the diaphragm 5 is disposed on the bottom surface of the diaphragm. A space between the diaphragm 6 and the case 7 serves as a pump chamber 3. An inlet flowing passage 1 with a check valve 4 serving as a fluid resistive element, and an outlet flowing passage 2 always communicating with the pump chamber even during the operation of the pump are opened. In the pump, the activation of the piezoelectric element is controlled by a cycle control means so as to provide the cycle of diaphragm in which the volume and pressure of the discharged fluid of the pump are increased. COPYRIGHT: (C)2009,JPO&INPIT
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