| 摘要 |
PROBLEM TO BE SOLVED: To provide an ink jet recording head preventing air bubbles inside a pressure chamber from flowing into a nozzle, and preventing dot skipping; and to provide a method for producing the ink jet recording head.SOLUTION: An ink jet recording head includes a silicon substrate 14, a nozzle plate 12, piezo electric elements (actuators) 13 and a back plate 16. The silicon substrate 14 is provided with a pressure chamber 14a from one end surface to the other end surface. The nozzle plate 12 is located on one end surface of the silicone substrate 14, and has a vibration plate 30 to block the pressure chamber 14a and a nozzle hole 12a communicating with the pressure chamber 14a. The silicone substrate 14 is integrally formed on the end surface at the side of the back plate 12, and has a partition wall 18 partitioning the inside of the pressure chamber 14a into a plurality of parts except for a communication passage 17 adjacent to the nozzle hole 12a.SELECTED DRAWING: Figure 4 |
