| 摘要 |
According to the disclosed present invention, a sagging detection apparatus for a substrate transferer which detects sagging while transferring a plurality of substrates comprises: a sensor unit for periodically scanning a distance between the substrates; a driving unit for moving the sensor unit in a substrate stacking direction; and a detecting unit for detecting sagging of the substrates with information sensed by the sensor unit. According to the configuration, by detecting sagging generation while transferring the substrate, a quality of the substrate can be increased. |
