| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectral characteristic measuring apparatus capable of acquiring a clear interferogram.SOLUTION: A spectral characteristic measuring apparatus comprises: a fixed reflection surface 201 and a movable reflection surface 301 arranged side by side; an objective lens 10 for guiding a measurement beam emitted from a measurement point of a measurement target object to the fixed reflection surface 201 and the movable reflection surface 301; an imaging lens 12 for condensing measurement beams reflected on the fixed reflection surface 201 and the movable reflection surface 301 onto an imaging surface respectively; a CCD camera 13 having a plurality of detection pixels two-dimensionally arranged on the imaging surface; and a processing unit 141 finding an interferogram of the measurement beam on the basis of light intensity change detected by the CCD camera 13 by moving the movable reflection surface 301, and acquiring a spectrum through Fourier transformation of the interferogram. The apparatus further comprises a determination unit 142 which determines whether or not the movable reflection surface 301 is relatively inclined with respect to the fixed reflection surface 201 on the basis of the detection result of the CCD camera 13.SELECTED DRAWING: Figure 5 |
