INTERFERENCE MEASURING DEVICE AND INTERFERENCE MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an interference measuring device and an interference measuring method excellent in work efficiency.SOLUTION: The interference measuring device comprises: a light source 1; a beam splitting element 3 for splitting a beam L1 into a reference light beam L3 and a measurement light beam L4; a reference light beam side lens 8 for condensing the reference light beam to a reference surface 9; a measurement light beam side lens 12 for condensing the measurement light beam to a measurement target object 13; a reference light beam side diaphragm 7 disposed between the beam splitting element and the reference light beam side lens; a measurement light beam side diaphragm 11 disposed between the beam splitting element and the measurement light beam side lens; and a diaphragm adjusting mechanism for changing the aperture of the reference light beam side diaphragm and the aperture of the measurement light beam side diaphragm, respectively. The diaphragm adjusting mechanism changes the reference light beam side diaphragm and the measurement light beam side diaphragm for adjustment so that the aperture diameters become equal to each other.SELECTED DRAWING: Figure 1