EDDY CURRENT INSPECTION DEVICE AND EDDY CURRENT INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an eddy current inspection device and an eddy current inspection method using the same capable of efficiently and accurately performing an inspection without removing deposits and estimating a depth of the defect.SOLUTION: An eddy current inspection device includes: a first calibration curve showing a relationship between a lift-off distance of a probe 10 and an output value of one inspection coil; and a second calibration curve group having a second calibration curve showing the relationship between a depth of the simulated defect formed on a test-piece and the output value difference of a pair of detection coils. The lift-off distance corresponding to the output value of one detection coil measured from the first calibration curve is acquired as a film thickness of the deposit. The second calibration curve corresponding to the lift-off distance equivalent to the acquired film thickness is selected from the second calibration curve group. The depth of the simulated defect corresponding to the output value difference of the pair of detection coils measured from the selected second calibration curve is acquired as the depth of the defect.SELECTED DRAWING: Figure 1