| 摘要 |
PURPOSE:To etch the surface of a work at a high rate and to recycle an etchant by focusing a laser beam on the surface of the work in the etchant and electrolytically recovering the work component from the spent etchant. CONSTITUTION:An etchant 2 such as aq. FeCl3 is introduced into an etching tank 1 contg. a work 3 of Fe, etc., and a laser beam from a laser oscillator 20 is focused at an etching part on the surface 4 of the work 3 by a converging head 11 to heat the surface, and the surface is etched at an extremely high rate. The residual liq. is electrolyzed by two carbon electrodes 29 in an etchant tank 13 to deposit and recover Fe on the cathode, and the remaining liq. is returned to the tank 1 as the etchant. The loss of the work surface 4 by etching is detected by a measuring camera 26 through a fiber scope 22, the head 11 is moved forward by a movement control means 25 through a picture processing device 23 in accordance with the result to focus the laser beam on the work 3 surface at all times, thus etching is promoted. |
