| 摘要 |
A horizontal (X-Y) table used in, for example, a bonding device including a lower table movable in one direction on a horizontal plane, an upper table installed on the lower table and movable in the other direction on the horizontal plane, an upper table driving deck which is supported by a bridge that straddles the upper table and is able to make a linear motion in the moving direction of the upper table on the upper table, a driving mechanism for the lower table, a driving mechanism for the upper table driving deck, and a link which connects the upper table and upper table driving deck so as to move them in the moving direction of the lower table, thus minimizing an area to be occupied by the X-Y table. |
