Use of hydrogen halide and hydrogen in separate streams as carrier gases in vapor deposition of iii-v compounds,申请号US19620209740-传众专利搜索

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发明名称	Use of hydrogen halide and hydrogen in separate streams as carrier gases in vapor deposition of iii-v compounds
摘要
申请公布号	US3218205(A)	申请公布日期	1965.11.16
申请号	US19620209740	申请日期	1962.07.13
申请人	MONSANTO COMPANY	发明人	RUEHRWEIN ROBERT A.
分类号	C30B25/02;C30B29/40;H01L21/205	主分类号	C30B25/02
代理机构		代理人
主权项
地址

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