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发明名称
Verfahren zur Herstellung von feinen Strukturen
摘要
申请公布号
DE1521529(A1)
申请公布日期
1969.09.11
申请号
DE19651521529
申请日期
1965.06.15
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
DAHLBERG,DR.DIPL.-PHYS.REINHARD
分类号
C23C14/04;H01L21/00
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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