| 摘要 |
PURPOSE:To suppress the temperature change in a sensor element section and increase the fitting strength therein by forming a solid electrolyte thin film on a heater. CONSTITUTION:A reference electrode 3, solid electrolyte thin film 2, and detecting electrode 1 are successively piled up on a heater 4 to form a sensor element section 7 in a manner that the film 3 will be engaged with the electrodes 1 and 3 like a comb. Or, the electrodes 1 and 3 are formed as being engaged with each other like a comb on the heater 4, and the film 2 is formed between the electrodes 1 and 3. Thus, since the section 7 becomes thin in thickness and is brought into contact with the heater 4 overally, the heater 4 and section 7 will show the same temperature. Therefore the temperature in the section 7 can be always kept to be constant by controlling the temperature in the heater 4 accurately. Further, the vibration resistance and impact resistance can be improved because the section 7 and heater 4 are formed as one body. |
