High vacuum film deposition plant with - ante chambers for charge trolleys

摘要

High vacuum film deposition plant comprising a composite chamber which consists of an outer chamber for one or several workpieces on trolleys, one chamber arm having doors separating each trolley and a separate workchamber accessible from each antechamber arm, comprising a working platform level with the platforms with the charges in the antechamber arms and a bell which can be lifted out of the way so as to permit changeover of charges. There are two vacuum pumping installations, one for the inner and one for the outer chamber. Charges can be changed over in the outer chamber at atmosphere whilst the inner work chamber is operating.