ANORDNUNG ZUM ERWAERMEN UND/ODER KUEHLEN VON TRAEGERN FUER IM VAKUUM AUFGEDAMPFTE SCHICHTEN,申请号DE19681811660-传众专利搜索

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发明名称	ANORDNUNG ZUM ERWAERMEN UND/ODER KUEHLEN VON TRAEGERN FUER IM VAKUUM AUFGEDAMPFTE SCHICHTEN
摘要
申请公布号	DE1811660(B2)	申请公布日期	1972.11.16
申请号	DE19681811660	申请日期	1968.11.29
申请人		发明人
分类号	C23C14/54	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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