| 摘要 |
<p>PURPOSE:To provide a high output, low current operation super luminescent diode being employed as a light source for optical fiber gyro or the like, and fabrication thereof. CONSTITUTION:A first conductivity type first optical guide layer 5 of Ga1-Y1AlYl and a second optical guide layer 6 of Ga1-Y2AlY2As are formed sequentially on at least one side on the main surface of an active layer, i.e., a Ga1-XAlXAs layer. A Ga1-ZAlZAs layer of opposite conductivity type having a stripe groove is formed on the second optical guide layer 6 and a Ga1-Y3AlY3As layer of same conductivity type as the optical guide layer is formed in the stripe window 7a. The mixed crystal ratios X, Y1, Y2, Y3, Z of AlAs satisfy following relationships; Z>Y3>Y2>X>=0, and Y1>Y2. The stripe window 7a is inclining at an angle of 3-15 deg. against the vertical plane at the front edge of the stripe window 7a.</p> |
