METHOD OF MANUFACTURING FILM STRUCTURES,申请号SU19843691710-传众专利搜索

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发明名称	METHOD OF MANUFACTURING FILM STRUCTURES
摘要
申请公布号	SU1162352(A1)	申请公布日期	1986.01.07
申请号	SU19843691710	申请日期	1984.01.13
申请人	FIZIKO-TEKHNICHESKIJ I IM.A.F.IOFFE	发明人	GAVRILYUK A.I.,SU;GUMENYUK A.P.,SU;LANSKAYA T.G.,SU;MANSUROV A.A.,SU;CHUDNOVSKIJ F.I.,SU
分类号	H01L21/385;(IPC1-7):H01L21/385	主分类号	H01L21/385
代理机构		代理人
主权项
地址

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