| 摘要 |
PURPOSE:To automate an operation of setting a wafer into a cup of a planetary dome and improve the efficiency of the operation by a method wherein a wafer loader is constituted by a wafer turning part, which is equipped with a mechanism turning the wafer after chucking it from the upper part, and a wafer attracting robot of orthogonal coordinate type with three axes X, Y and Z. CONSTITUTION:At a magazine conveying part 1, the leading magazine 6 is transferred to a wafer carrying-out apparatus 2 and a wafer 7 on the lowest level is drawn out by a belt conveyer 35 and transferred to a wafer turning part 3. At the wafer turning part 3, the wafer 7 is chucked by chucks 36 and 37 and, while being lifted, turned over 180 degrees. Then the attracting head 54 of a wafer attracting robot 4 reaches above the wafer 7 and attracts and fixes the back side of the wafer 7. Then the wafer 7 is transferred above a planetary dome 5 and released and set on the predetermined position. |
