发明名称 |
WAVEGUIDE TYPE LENS DEVICE |
摘要 |
PURPOSE:To easily manufacture a waveguide type lens by a two-beam interference exposing method by using an optical waveguide which decreases in effective refractive index gradually and a diffraction grating on the waveguide which has a constant period. CONSTITUTION:A buffer layer 23 of SiO2 is formed on a substrate 24 and etched with fluoric acid, etc., into a specific tapered shape. A waveguide layer 22 is formed thereupon and then the optical waveguide layer 22 decreases gradually in effective refractive index in the propagation direction of light. A silicon nitride film is deposited further thereupon and the diffraction grating 21 with a 0.6mum constant period is formed by the two-beam interference exposing method and a mask exposing method. When waveguide 25 with 0.8mum is made incident thereupon, it is converged on a convergence position 28. Thus, the waveguide lens is easily manufactured by the conventional two-beam interference exposing method. |
申请公布号 |
JPS6396606(A) |
申请公布日期 |
1988.04.27 |
申请号 |
JP19860243408 |
申请日期 |
1986.10.14 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
UNO TOMOAKI;SERIZAWA HIROMOTO;HORI YOSHIKAZU;MATSUI YASUSHI;ODANI JIYUN |
分类号 |
G02B6/122;G02B6/124;H01S5/00 |
主分类号 |
G02B6/122 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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