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经营范围
发明名称
FLATTENING USING ETCHBACK
摘要
申请公布号
JPH03159236(A)
申请公布日期
1991.07.09
申请号
JP19890299391
申请日期
1989.11.17
申请人
TOKYO OHKA KOGYO CO LTD
发明人
HIJIKATA ISAMU;SAMEZAWA MITSUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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