| 摘要 |
PURPOSE:To enable an ultraviolet ray emitting lamp to be sufficiently cooled down for avoiding the deposition of the title device. CONSTITUTION:Within the title ultraviolet ray exposure device, an ultraviolet ray emitting lamp 1 and an independent fluid path encircling an ultraviolet ray emitting lamp 1 for passing a cooling down fluid are formed, as well as an exposure chamber 6 forming a space containing the cooling down fluid path 2 passing ultraviolet rays 4, a lighting optical system 5 and coupling with the cooling down fluid path 2 for encircling the lighting optical system 5 is provided. |
