发明名称 |
QFP lead quality inspection system and method |
摘要 |
The leads of a QFP are examined by an optical system. The optical system includes a sensor head having two lasers, the outputs of the lasers being fed to a beam splitter which provides outputs at right angles to each other, and a ring-light which is disposed under the beam splitter and in actual alignment with the beam splitter. The sensor head is carried by a carriage in a single plane along two transverse directions. The carriage moves the sensor heads so as to examine one lead at a time along the peripheral edges of the QFP.
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申请公布号 |
US5406372(A) |
申请公布日期 |
1995.04.11 |
申请号 |
US19930048878 |
申请日期 |
1993.04.16 |
申请人 |
MODULAR VISION SYSTEMS INC. |
发明人 |
VODANOVIC, BOJKO;BLANCHARD, MICHEL |
分类号 |
G01B11/24;G01B11/245;H01L21/66;(IPC1-7):G01B11/24 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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