发明名称 QFP lead quality inspection system and method
摘要 The leads of a QFP are examined by an optical system. The optical system includes a sensor head having two lasers, the outputs of the lasers being fed to a beam splitter which provides outputs at right angles to each other, and a ring-light which is disposed under the beam splitter and in actual alignment with the beam splitter. The sensor head is carried by a carriage in a single plane along two transverse directions. The carriage moves the sensor heads so as to examine one lead at a time along the peripheral edges of the QFP.
申请公布号 US5406372(A) 申请公布日期 1995.04.11
申请号 US19930048878 申请日期 1993.04.16
申请人 MODULAR VISION SYSTEMS INC. 发明人 VODANOVIC, BOJKO;BLANCHARD, MICHEL
分类号 G01B11/24;G01B11/245;H01L21/66;(IPC1-7):G01B11/24 主分类号 G01B11/24
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