Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby,申请号AU19980090957-传众专利搜索

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发明名称	Stage device, a scanning aligner and a scanning exposure method, and a device manufactured thereby
摘要
申请公布号	AU9095798(A)	申请公布日期	1999.04.12
申请号	AU19980090957	申请日期	1998.09.18
申请人	NIKON CORPORATION	发明人	KENJI NISHI
分类号	G03F7/20;H01L21/68	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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