APPARATUS FOR CLEANING OUTER TUBE FOR SEMICONDUCTOR FABRICATION

摘要

PURPOSE: An apparatus for cleaning an outer tube for semiconductor fabrication is provided to prolong the life and the usage cycle of an outer tube as well as to reduce the cost of equipment for replacing the outer tube. CONSTITUTION: An apparatus(20) cleans an outer tube(1) by etching an inner side selectively without etching an outer side of the outer tube. The apparatus comprises: a cleaning bath(21) where a support rod(22) in which the outer tube is placed is installed in order for the outer tube separated from a reaction chamber to be located inside; a cleaning solution jetting tube(23) jetting the cleaning solution to clean the inner side of the outer tube by being inserted into the inside of the outer tube; and a cleaning solution supply source(24) connected with the cleaning solution jetting tube by a cleaning solution supply tube(25) to supply the cleaning solution to the cleaning solution jetting tube.