| 摘要 |
PURPOSE: A power supply box of a semiconductor diffusion equipment is provided to prevent a damage of a control unit by discharging continuously heat generated in a power box. CONSTITUTION: A power supply box of a semiconductor diffusion equipment comprises a cooling fan(14), a control board(18), a silicon controlled rectifier(20), and a power trans(22), an exhaust duct(16). The power supply box(10) receives air from outside by rotating the cooling fan. Accordingly, the heat generated in the power supply box is cooled by the air. The inner heat is discharged to the outside by the exhaust duct. The cooling fan is installed between the power trans and the silicon controlled rectifier to supply directly the air.
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