ION SOURCE MODULE OF ION INJECTOR

摘要

PURPOSE: An ion source module of ion injector is provided to save a cost required in a manufacture of a semiconductor product by inserting a rear surface slit portion between an arc reaction chamber and a source aperture. CONSTITUTION: An arc reaction chamber(21) in which a reaction is occurred is installed. A gas providing tube(22) provides a gas for forming an ion beam(30) to the arc reaction chamber(21). A filament(23) is installed in an inner portion of the arc reaction chamber(21) and emits a thermal electron. A source electrode(24) is installed to both sides of the arc reaction chamber(21) and provides a voltage. A source aperture(25) is connected to the arc reaction chamber(21) and forms a hole(26) for extracting the ion beam(30) generated in the inner portion of the arc reaction chamber(21). A rear surface slit portion(27) is connected between the arc reaction chamber(21) and the source aperture(25).