METHOD FOR SETTING HEIGHT OF CHECKING FACILITY OF SEMICONDUCTOR DEVICE FACILITY

摘要

PURPOSE: A method for setting the height of a checking facility of a semiconductor device is provided to set up a checking facility of a semiconductor device accurately and to reduce the leveling time and accomplishes the level standardization by facilities, by proceeding an accurate leveling when checking height by each part of the facility. CONSTITUTION: A height of each part of a checking facility is set up according to a block gauge(10) by fabricating the block gauge whose height is increased step by step, in order to set the height for each part of the facility. By the method, the accurate maintenance and checking of the apparatus is enabled and the repairing time is also reduced. Thus, the trouble of the apparatus is prevented by standardizing the individual height setting methods.