| 摘要 |
PURPOSE: A probe card for testing a semiconductor device is provided, which can perform a 32 parallel test by using the prior 16 parallel tester. CONSTITUTION: The probe card includes a printed circuit board where external connection terminals including a driving terminal(61) inputting a driving signal to a device on a wafer and input/output terminals inputting/outputting each test signal are formed, and a probe pin(70) is connected to the input/output terminal and the driving terminal respectively. Two probe pins are connected to at least more than one driving terminal. The external connection terminal is arranged on both sides of an area where 4x8 devices are located on the wafer to be probed. The external connection terminals are adjacent to 1 row probe devices of 1 row and 2 row on the wafer, and the external connection terminals are adjacent to 4 row probe devices of 3 row and 4 row on the wafer.
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