| 摘要 |
PURPOSE: An electro-luminescence device and a fabricating method thereof are provided to form a flat panel display of high picture quality and high resolution by separating a cathode electrode, electrically. CONSTITUTION: The first thermal oxide layer(502) for forming a gate insulating layer is deposited on an upper portion of a silicon wafer(500). An amorphous, polycrystalline, and micro-crystalline silicon doped with PH3 is formed on an upper portion of the first thermal oxide layer(502). The silicon is patterned and removed by forming a cathode electrode(504). The second thermal oxide layer(506) for forming a gate insulating layer is deposited on an upper portion of the cathode electrode(504) in order to separate the cathode electrode(504) into an upper portion and a lower portion. A gate electrode(508) is formed on an upper portion of the second thermal oxide layer(506). The gate electrode(508) and the second thermal oxide layer(506) are removed to form a pattern having a gate hole for forming a micro tip(509). The micro tip(509) is formed within the gate hole.
|
