| 摘要 |
PURPOSE:To provide an optical waveguide type element capable of evaluating the proton replacement conditions such as proton replacement amount, annealing treatment condition, etc., in short period in an optical waveguide type element in which an optical waveguide is formed selectively on an optical waveguide forming substrate by proton replacement method. CONSTITUTION:An optical waveguide 32 is formed on an optical waveguide forming substrate 11 by proton replacement method, and also a proton replacement part 31 is formed to measure an infrared absorption peak by OH base. Also an electrode for light modulation 41 is formed selectively on the optical waveguide forming substrate 11 to produce a light modulator 40. Then the infrared ray is made incident vertically on the proton replacement part 31 and infrared absorption spectrum is measured to evaluate the proton replacement condition of the produced light modulator 40. |
