| 摘要 |
<p>PURPOSE:To easily strip pellicle film after the film is formed on a substrate and to obtain a film without scratches or wrinkles by coating the surface of the substrate with an amorphous fluorocarbon resin. CONSTITUTION:The releasble substrate for formation of films is coated with an amorphous fluorocarbon resin. The amorphous fluororesin to be used is, for example, commercially available 'Cytop(R)' and 'Teflon(R)AF'. To treat the substrate with the amorphous fluorocarbon resin, the resin is dissolved to a specified concn., and the obtd. soln. is applied on the surface of a substrate with a spin coater or roll coater. A pellicle film is formed by using this substrate coated with the amorphous fluorocarbon resin, and the formed film is stripped off. Therefore, the obtd. substrate has excellent releasing property so that an org. film formed on this substrate can be easily stripped off and the obtd. pellicle film has no scratch or wrinkle.</p> |
