发明名称 HOUSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a housing device in which the circulation of gas between an area for arranging a movable body and an area for arranging a driving device can be cut off at a high level. SOLUTION: The housing device is for housing one or both of the movable body 21 and the driving device 40. The device is provided with partition members 11a, 14 and 16 having opening parts along the moving direction of the body 21 and arranged between the body 21 and the device 40, a cover body 11 for surrounding one or both of the body 21 and the device 40, connection tools 55, 56, 57 and 58 provided within the opening parts of the members 11a, 14 and 16 and arranged to connect the body 21 with the device 40, and sheets 65, 66 connected to the tools 55, 56, 57 and 58, and arranged to extend along the opening. In the members 11a, 14 and 16, both of the edge parts of their opening parts are formed to be cylindrical respectively and notched grooves are formed on mutually opposing surfaces of a pair of respective cylindrical parts 13 and 15. The sheets 65 and 66 have their both-side edges inserted to the inside of the parts 13 and 15 respectively from the notched grooves.
申请公布号 JP2002261070(A) 申请公布日期 2002.09.13
申请号 JP20010052730 申请日期 2001.02.27
申请人 SUMITOMO PRECISION PROD CO LTD 发明人 MIZUKAWA SHIGERU;MURATA TAKASHI;NAKADA KATSUTOSHI;MATSUMOTO SHUNJI
分类号 G12B9/04;B23Q11/08;H01L21/304;(IPC1-7):H01L21/304 主分类号 G12B9/04
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