Method of manufacturing a piezoelectric tunable microresonator

摘要

A resonator is manufactured by forming on an insulating substrate (10) a first portion of a conductive material and a second portion of another material on the first portion, forming an insulating layer (20) having its upper surface flush with an upper part of the second portion, forming by a succession of depositions and etchings a beam (30) of a conductive material above the second portion, and removing the second portion. Manufacture of a resonator comprises forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion, the second portion being formed of a material selectively etchable with respect to the materials of other elements formed during the process; forming an insulating layer having its upper surface flush with an upper part of the second portion; forming by a succession of depositions and etchings a beam of a conductive material above the second portion, beam ends being on the insulating layer on either side of the second portion, the upper surface of the second portion being exposed on either side of the beam, a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above a beam portion located above the second portion; and removing the second portion.