ELECTROSTATIC DRIVE MEMS ELEMENT, MANUFACTURING METHOD THEREOF, OPTICAL MEMS ELEMENT, OPTICAL MODULATION ELEMENT, GLV DEVICE, AND LASER DISPLAY

摘要

The present invention provides an electrostatic drive type MEMS device and a manufacturing method thereof, in which flattening the surface of a driving side electrode, improving performance, and further the improvements of the degree of freedom of designing in the manufacturing process are implemented. In addition, the present invention provides a GLV device using this MEMS device, and further a laser display using this GLV device. <??>In the present invention an electrostatic drive type MEMS device includes a substrate side electrode and a beam having a driving side electrode driven by electrostatic attraction force or electrostatic repulsion force that acts between the substrate side electrode and driving side electrode, in which the substrate side electrode is formed of an impurities-doped conductive semiconductor region in a semiconductor substrate. <IMAGE>