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发明名称
DEPOSITION METHODS UTILIZING PHASED ARRAY MICROWAVE EXCITATION, AND DEPOSITION APPARATUSES
摘要
申请公布号
KR20040108723(A)
申请公布日期
2004.12.24
申请号
KR20047016189
申请日期
2003.03.31
申请人
发明人
分类号
C23C16/511;C23C16/40;C23C16/44;C23C16/455;C30B25/10;H01J37/32;H01L21/205;H01Q21/00
主分类号
C23C16/511
代理机构
代理人
主权项
地址
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